Article ID Journal Published Year Pages File Type
1593626 Solid State Communications 2011 4 Pages PDF
Abstract

Leakage currents through In/MgO/n-type Si/In structures were studied. The electrical conduction investigations suggest that the leakage behavior is governed by the Schottky (Poole–Frenkel) emission for the gate (substrate) injection. This is because of strong leakage current dependent on the interfacial property of devices. It is shown that the discrepancy in the MgO permittivity extracted from the Schottky and Poole–Frenkel emissions is due to the formation of intermediate MgSixOy layer.

Research highlights► Leakage currents through In/MgO/n-type Si/In structures were studied. ► The leakage behavior is governed by the Schottky emission for gate injection. ► The conduction mechanism is the Poole–Frenkel emission for substrate injection. ► Strong leakage current dependent on the interfacial property was found.

Related Topics
Physical Sciences and Engineering Materials Science Materials Science (General)
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