| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1594943 | Solid State Communications | 2008 | 4 Pages |
Abstract
In this work, tantalum oxide (TaOx) films were deposited on quartz glass substrates by pulsed laser deposition (PLD) and ionized plasma-assisted pulsed laser deposition (IPA-PLD). The effects of oxygen pressures and ionized oxygen plasma-assistance (IOPA) on the optical properties of deposited films have been studied. Ultraviolet-visible-near infrared (UV-VIS-NIR) scanning spectrophotometry was used to measure the transmittance of deposited films and to determine the optical band gap and absorption coefficient. Results show that the transmittance, absorption coefficient, band gap and chemical composition of deposited films reveal a strong dependence on the oxygen pressures and IOPA. Under optimum condition of IOPA, the refractive index of the synthesized film was 2.22 (at 633Â nm wavelength), while an optical band gap of 4.18Â eV was obtained. These two values compare very favorably with films produced by other methods.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Xiliang He, Jiehua Wu, Lili Zhao, Jia Meng, Xiangdong Gao, Xiaomin Li,