Article ID Journal Published Year Pages File Type
1595794 Solid State Communications 2008 5 Pages PDF
Abstract

A (110) preferred Pt electrode by using a (100)-oriented conductive oxide electrode LaNiO3 film as an adhesion layer on a γγ- Al2O3 (100)/Si substrate has been deposited by RF magnetron sputtering. It was found that the phase instability of LaNiO3 almost has no effect on the (110)-orientated Pt growth. Highly (110)-textured Pb(Zr0.40Ti0.60)O3 films can been achieved when it was deposited on the (110) preferred Pt bottom electrode. The as-grown Pb(Zr0.40Ti0.60)O3 films possesses excellent dielectric, ferroelectric and pyroelectric properties. The results indicate that the Pt/LNO/γ- Al2O3/Si substrate is attractive for depositing highly (110)-orientated ferroelectric films with perovskite structure and the highly (110)-orientated Pb(Zr0.4Ti0.60)O3 films are promising for sensor and actuator applications.

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Physical Sciences and Engineering Materials Science Materials Science (General)
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