Study of three-component ferroelectric perovskite superlattices

We fabricated the three-component ferroelectric superlattices consisting of alternating layers of SrTiO3, BaTiO3 and CaTiO3 (SBC) with variable interlayer thickness on Pt(111)/TiO2/SiO2/Si(100) substrates by pulsed laser deposition. The fabrication of superlattice structures was confirmed by the presence of satellite reflections in x-ray diffraction analysis and a periodic concentration of Sr, Ba and Ca throughout the film in depth profile of secondary ion mass spectrometry analysis. The surface morphology evolutions of the films with different thickness of each layer by varying laser pulse shots were investigated by Scanning Electron Microscopy and Atomic Force Microscopy. The Pr (remnant polarization) and Ps (saturation polarization) of SBC superlattice with 10 nm individual layer thickness were found to be around 4.5 μC/cm2 and 27 μC/cm2 respectively.