Lower temperature growth of single phase MgZnO films in all Mg content range

MgZnO films are grown on (0 0 0 1) sapphire substrates by pulsed laser deposition. The crystal structure and optical properties of the MgZnO films have been systematically investigated with the methods of energy dispersive spectroscopy (EDS), X-ray diffraction and spectrophotometer. The EDS results show that the MgZnO films with different Mg contents can be prepared by adjusting the Mg content in the target and substrate temperature. Single phase MgZnO films are successfully obtained in all Mg content. The structural transition from hexagonal to cubic phase has been observed at the Mg content around 0.4. Optical analysis indicates that the bandgap of the MgZnO films can be tailored by controlling the Mg content in the films.