Article ID Journal Published Year Pages File Type
1614496 Journal of Alloys and Compounds 2013 4 Pages PDF
Abstract
► The atomic bonding within a-Si1−xCx:H thin film prepared using PECVD is adjustable via annealing. ► With the increased annealing temperature, the content of Si-Hn group and C-Hn group decrease, and more Si-C bonds and sp3 hybridized C clusters form in the a-Si1−xCx:H thin film. ► Annealing with increased temperature induces enlarged optical band gap. ► The PL efficiency is enhanced via the atomic bonding control.
Related Topics
Physical Sciences and Engineering Materials Science Metals and Alloys
Authors
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