Article ID Journal Published Year Pages File Type
1614672 Journal of Alloys and Compounds 2013 5 Pages PDF
Abstract
► A multi-layered Ti/Ni/Ti/Au Ohmic contact to Al-doped ZnO thin films was formed. ► The as-deposited metallic contact showed Ohmic behavior. ► The lowest specific contact resistivity was 6.69 × 10−5 Ω cm2 after 500 °C annealing. ► The contact annealed above 600 °C showed Schottky transformation. ► Interface diffusions induced by annealing resulted in the Schottky transformation.
Related Topics
Physical Sciences and Engineering Materials Science Metals and Alloys
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