| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1615293 | Journal of Alloys and Compounds | 2012 | 5 Pages |
Abstract
⺠A dual AlN buffer layer structure is proposed to grow AlN films. ⺠AlN films could be improved obviously by using the dual AlN buffer layer. ⺠The physical mechanism are discussed.
Related Topics
Physical Sciences and Engineering
Materials Science
Metals and Alloys
Authors
D.G. Zhao, D.S. Jiang, L.L. Wu, L.C. Le, L. Li, P. Chen, Z.S. Liu, J.J. Zhu, H. Wang, S.M. Zhang, H. Yang,