| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1616072 | Journal of Alloys and Compounds | 2012 | 7 Pages |
Abstract
⺠Growth of AlN Nucleation layers and its effect on high temperature AlN films quality were investigated. ⺠AlN nucleation layers stabilizes the epitaxial growth of AlN and improves the surface morphology of AlN films. ⺠Increasing growth temperature of AlN NLs as well as AlN films improves the structural quality and limits the formation of cracks.
Related Topics
Physical Sciences and Engineering
Materials Science
Metals and Alloys
Authors
M. Balaji, A. Claudel, V. Fellmann, I. Gélard, E. Blanquet, R. Boichot, A. Pierret, B. Attal-Trétout, A. Crisci, S. Coindeau, H. Roussel, D. Pique, K. Baskar, M. Pons,