Article ID Journal Published Year Pages File Type
1617052 Journal of Alloys and Compounds 2011 4 Pages PDF
Abstract

The Al-doped ZnO thin films were synthesized by aerosol-assisted chemical vapor deposition. The concentration-dependent behavior of hydrogen in the films was discussed, finding that as hydrogen is introduced at a relatively low level, it tends to take the oxygen vacancy site and form a hydrogen-oxygen vacancy complex which behaves as a shallow donor, on the other hand it reduces the solubility of the substitutional Al; then higher hydrogen concentration results in the formation of H2 neutral molecular complex.

Related Topics
Physical Sciences and Engineering Materials Science Metals and Alloys
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