Article ID Journal Published Year Pages File Type
1617320 Journal of Alloys and Compounds 2011 5 Pages PDF
Abstract
► A new cost-efficient precursor of nBu2Sn(acac)2 was applied for the deposition of SnO2 films. ► The study of volatility and stability of nBu2Sn(acac)2 indicates the good adaptability for the CVD process. ► The different variation of the nucleation and growth rates with the deposition temperature is proposed to explain the observed unusual change of crystallite size. ► A systematic study of physical properties of as-deposited SnO2 was conducted considering the effect of deposition temperature.
Related Topics
Physical Sciences and Engineering Materials Science Metals and Alloys
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