Dependence of lattice distortion of monoclinic phase on film thickness in Pb(Zr0.58Ti0.42)O3 thin films

▶ The phase composition of different-orientation grains is different. ▶ The lattice constants of monoclinic phase in our films are highly sensitive to film thickness, in other words, the lattice constants of monoclinic phase are highly sensitive to residual stress. ▶ In the case of mixed textures, a method using ψ-scan XRD to characterize the phase type of PZT film is presented.