| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1618280 | Journal of Alloys and Compounds | 2011 | 4 Pages |
Abstract
Dielectric ceramic thin film was fabricated on SiO2 (1 1 0) substrates by radio frequency (RF) magnetron sputtering method using a Zn-enriched (Ba0.3Sr0.7)(Zn1/3Nb2/3)O3 target. The microstructure, components, and morphological properties of the thin films were characterized thoroughly. The results reveal that the main phases of the thin films are BaxSr1−xNb2O6, which are of different compositions from that of the ceramic target due to Zn loss. The thin films are polycrystalline and of dense structure with uniform grain sizes and well-defined grain boundaries.
Related Topics
Physical Sciences and Engineering
Materials Science
Metals and Alloys
Authors
Feifei Ji, Feng Shi,