Article ID Journal Published Year Pages File Type
1621204 Journal of Alloys and Compounds 2010 4 Pages PDF
Abstract

Well-aligned ZnO nanorod arrays were synthesized by hydrothermal method on Si substrates that were covered with pre-deposited ZnO films as seed layers. The ZnO seed layers were deposited by RF magnetron sputtering. It is found that the seed layers prepared under different oxygen partial pressure sputtering parameters and annealing treatment have a great influence on the morphology of the ZnO nanorod arrays grown subsequently on them. Furthermore, growth positions of nanorod/microrod arrays were selectively controlled on the lithography-assist ZnO seed layer.

Related Topics
Physical Sciences and Engineering Materials Science Metals and Alloys
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