Synthesis and structural characterization of undoped and Co doped zinc oxide thin films obtained by aerosol assisted chemical vapour deposition

Dilute magnetic oxides are transparent, wide-bandgap materials that behave ferromagnetically when doped with a few percent of a magnetic 3d cation. They have attracted a great deal of interest due to the integration of semiconducting and magnetic properties in a material, that is a prerequisite for successful fabrication of useful devices for the emerging technologies of spintronics. Here we report a study of growth characteristics and microstructural properties of undoped and Co doped ZnO films grown onto borosilicate glass substrates, using aerosol assisted chemical vapour deposition method. The obtained films are single phase, of Wurtzite type, some of them with a strong c-axis orientation, i.e. with the c-axis normal to the substrate surface.