X-ray absorption spectroscopy and X-ray diffraction analysis of crystalline CoTi2 grown by DC co-sputtering: A theoretical and experimental comparison

A series of thin films were grown at 500 °C with a Co and Ti base on silicon substrate oriented at (4 0 0) by means of the DC co-sputtering technique. For 7 and 11% Co concentrations, 50, 80, and 110 W were used. CoTi2 structure was simulated with the FEFF routine of the WinXAS program. XAS analyses were also performed in order to compare simulated results with experimental results. The X-ray diffraction and atomic absorption results reveal a CoTi2 (Fd-3ms) and Ti (P63/mmc) phase, while extended X-ray absorption fine structure spectroscopy shows slight variations in the coordination numbers and distances from close neighbors and have 0-7% deviations. The results showed good agreement between the theoretical and experimental results.