Improvement in the mechanical properties of tin oxide thin films due to vapour chopping

Vapour chopping technique is successfully used to improve the mechanical properties of tin oxide thin films. The effect of vapour chopping, thickness and oxidation temperature on the adhesion and intrinsic stress of tin oxide thin films is reported. Increase in adhesion and decrease in stress due to increase in thickness and oxidation temperature was observed. Both the vapour chopped and nonchopped films show decrease in adhesion and increase in stress upon exposure to air ageing. The effect of air ageing was found small in vapour chopped films than those in nonchopped films. It is concluded that vapour chopping technique improves the quality of thin film deposits.