Preparation and electrical properties of sol infiltrated Pb(Zr0.7Ti0.3)O3 ferroelectric thick films

Ferroelectric PZT(70/30) thick films were fabricated by the hybrid technique adding the sol coating process to the normal screen-printing process to obtain a good densification. Structural and electrical properties of the thick films with the sol concentration were investigated. The thickness of all thick films spin-coated four times was approximately 80-85 μm. The relative dielectric constant increased and dielectric loss decreased with increasing the sol concentration, the values of the thick film coated with sol concentration of 1.5 M were 698 and 2.5% at 1 kHz, respectively. And the remanent polarization and dielectric breakdown strength of the thick film coated with sol concentration of 1.5 M were about 38 μC/cm2 and 200 kV/cm, respectively. The leakage current densities were less than 10−8 A/cm2 at the applied electric field range of 0-100 kV/cm in all thick films.