Thickness dependence of superconductivity for La1.85Sr0.15CuO4 thin film deposited by pulsed electron deposition technique

High-quality superconducting La1.85Sr0.15CuO4 (LSCO) thin film is deposited on (1 0 0) SrTiO3 substrate by a novel pulsed electron deposition (PED) technique and a thickness-dependent superconductivity is also observed. Parameters including the place of the substrate in the plume, the target-to-substrate distance and the pressure in the deposition chamber, can affect the film thickness in the deposition process. For the place of the substrate in the plume, a Gaussian distribution of the film thickness is found. Analogical relations of the target-to-substrate distance and the deposition pressure in PED as in PLD are also educed in this paper.