Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1625667 | Journal of Alloys and Compounds | 2007 | 4 Pages |
Abstract
SrTiO3 films were synthesized by spray pyrolysis in combination with a high-temperature inductively-coupled plasma (ICP) as the heat source (spray-ICP technique). Sapphire and fused quartz were used as substrates. Ten minutes of film formation yielded films of 0.5-1.0 μm in thickness. The structure of the films consisted of crystallites about 0.1 μm in size. With respect to the homogeneity of the size and shape of the crystallites, sapphire is superior over fused quartz. X-ray diffraction measurements of the films revealed preferred orientation peaks of (2 0 0), (1 1 1), and (1 1 0) depending on the substrates and their locations from the ICP source.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Metals and Alloys
Authors
Kyoung Jin Kim, Mitsuo Suzuki, Akira Yoshikawa, Tsuguo Fukuda, Keun Ho Auh, Kun-Chul Shin,