Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1630678 | Journal of University of Science and Technology Beijing, Mineral, Metallurgy, Material | 2006 | 4 Pages |
Abstract
Aluminum-doped zinc oxide (ZnO: Al), abbreviated as ZAO, is a novel and widely used transparent conductive material. The ZAO powder was synthesized by chemical coprecipitation. The ZAO ceramic sputtering target materials were fabricated by sintering in air, and ZAO transparent conductive films were prepared by RF magnetron sputtering on glass substrates. XRD proved that such films had an orientation of (002) crystal panel paralleled to the surface of the glass substrate. The average transmittance of the films in the visible region exceeded 80%.
Related Topics
Physical Sciences and Engineering
Materials Science
Metals and Alloys
Authors
Wei Shao, Ruixin Ma, Bin Liu,