Cluster-assembled cobalt doped ZnO nanostructured film prepared by low energy cluster beam deposition

Cobalt doped ZnO film assembled by the nanoparticles was prepared by low energy cluster beam deposition. The microstructure, phase structure and optical properties were investigated for the nanostructured films. The results show that the nanostructured film was assembled by monodisperse spherical nanoparticles with average diameter of about 29.3 nm which are distributed uniformly and compactly. The results of X-ray diffraction (XRD) show that cobalt doped ZnO nanostructured film is indexed to a wurtzite structure of ZnO, and no Co-phase structure and other phases are observed. The UV-visible absorption spectra show that the optical band-gap of the film is broadened after doping.