Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1642014 | Materials Letters | 2015 | 5 Pages |
Abstract
The α-quartz could grow at the interface of silicon nanowires (SiNWs) after thermal treatment. The SiNW/α-quartz composite was utilized as an active layer to fabricate piezoelectric nanogenerators on a flexible polyethylene terephthalate substrate, capable of converting mechanical energy into electricity. An insulative Al2O3 layer was designed to fill the gaps of the composite to avoid the leakage of current by atomic layer deposition and reactive ion etching process. The flexible nanogenerators produced an average short-circuit current of 0.6 μA under the force of 60 N and the maximum power value reached about 380 nW with the load resistance of 20 MΩ.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Liangbin Liu, Kailing Lu, Tao Wang, Fan Liao, Mingfa Peng, Mingwang Shao,