| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1642247 | Materials Letters | 2015 | 4 Pages |
•Screen-printed multilayer thick films with Ag inner electrodes were fabricated.•Laminated multilayer structure with clear interfaces of PZT and Ag was obtained.•11 layered specimens showed giant d33 and strain of 1883 pC/N and 0.66%.•The voltage to obtain the same displacement was decreased from 3072 to 180 V.
In this study, high performance multilayer thick films composed of 0.7Pb(Zr0.46Ti0.54)O3–0.1Pb(Zn1/3Nb2/3)O3–0.2Pb(Ni1/3Nb2/3)O3 with Ag inner electrodes have been successfully fabricated via screen-printing and co-firing process. The sintering temperature could be reduced to 900 °C through addition of 1 wt% low-melting sintering aids. Ag diffusion was not observed at 900 °C, indicating favorable coherence. Multilayer thick films with 5 layers showed optimal electric properties: d33, ε33T/ε0, tan δ, and Pr of 1021 pC/N, 1167, 1.92% and 56.44 μC/cm2. And 11 layered specimens exhibited giant d33 and strain of 1883 pC/N and 0.66% at 4 kV/mm. The applied voltage to obtain the same displacement was decreased from 3072 to 180 V for 11 layered specimens, compared to bulk ceramics. Such prominent properties indicate that co-fired PNN–PZN–PZT multilayer thick films are suitable for applications like micro-actuators and micro-transdusers in MEMS system.
