Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1644629 | Materials Letters | 2014 | 4 Pages |
Abstract
We investigated heteroepitaxial growth of multidomain Ga2O3 thin films deposited using radio frequency magnetron sputtering onto sapphire(001) substrates. The crystalline orientation of the films was examined using high-resolution synchrotron X-ray diffraction. Corundum α- and monoclinic β-Ga2O3 coexisted in the as-grown samples. Azimuthal angle scans of the in-plane β(020) and α(303Ì0) Bragg peaks revealed that the α-Ga2O3 and β-Ga2O3 both showed 12-fold in-plane rotational symmetry and, in particular, that the α-Ga2O3 domains rotated 30° to the in-plane direction were tilted ±3° to the sapphire[112Ì0] direction. The optical bandgaps of the as-grown and annealed samples were estimated using ultraviolet-visible-infrared spectroscopy.
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Nanotechnology
Authors
H.C. Kang,