Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1650746 | Materials Letters | 2008 | 4 Pages |
Abstract
Growth of bulk 2H–SiC single crystals in a C–Li–Si ternary melt system was successful. The growth of 2H–SiC must be conducted at lower temperatures than that of other SiC poly-types. The lithium flux solved this problem, as it is usable for growth under 1000 °C due to its low melting temperature. Success in the growth of 2H–SiC single crystals in this study may unlock the potential for realizing high-performance electronic devices by fabricating the devices on 2H–SiC single-crystal substrates.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Fumio Kawamura, Takashi Ogura, Mamoru Imade, Masashi Yoshimura, Yasuo Kitaoka, Yusuke Mori, Takatomo Sasaki,