Article ID Journal Published Year Pages File Type
1652827 Materials Letters 2007 4 Pages PDF
Abstract

Bi3.15Nd0.85Ti3O12 (BNdT) thin films with predominant (104)/(014) orientation were fabricated directly on (111)Pt/Ti/SiO2/Si substrates through a sol–gel process. The volume fraction of (104)/(014)-oriented grains in the film was estimated to be about 65% according to X-ray pole figure. The BNdT film is dense and uniform and consists of columnar grains penetrating the whole film thickness. The (104)/(014)-oriented BNdT film capacitors showed excellent ferroelectric properties with 2Pr = 46.4 μC/cm2 and Ec ≈ 140 kV/cm. The films also exhibit excellent piezoelectric property, with high piezoelectric coefficient d33 ≈ 17 pm/V.

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Physical Sciences and Engineering Materials Science Nanotechnology
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