Article ID Journal Published Year Pages File Type
1653038 Materials Letters 2007 4 Pages PDF
Abstract

In this paper a new technology for boron thin film deposition is presented. The film in high vacuum conditions is condensing on the sample from the plasma state of the vapor phase of the anode material, generated by a Thermionic Vacuum Arc (TVA). Boron coating is one of the technologies recently considered to be of special interest due to the qualities of boron. The aim of this paper is to present the use of TVA technology for boron coating.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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