| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1654276 | Materials Letters | 2006 | 4 Pages |
Abstract
Nanocrystalline diamond films (NDFs) have been deposited using radio-frequency plasma enhanced chemical vapor deposition (r.f.-PECVD) at temperature as low as 500 °C. The CO/H2 ratio has been shown to exert a profound effect on the structure configuration of the NDFs. The nano-scale structures of the films have been shown to evolve from columnar structure to grainy structure with the increase of the CO/H2 ratio from 12:1 to 20:1. Such evolution is suggested to be the result of the enhanced secondary nucleation process. It gives an insight of the nucleation and growth process of NDFs and provides useful information on the optimal control of NDFs deposition.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Xingbo Liang, Lei Wang, Deren Yang,