| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1654401 | Materials Letters | 2006 | 4 Pages |
Abstract
Lead zirconate titanate (PZT) thin films were created on ST-X quartz using radio frequency magnetron sputtering deposition. PZT films deposited on quartz are used as a new piezoelectric substrate for surface acoustic wave (SAW) devices. Microelectromechanical technique was used to fabricate interdigital transducers on the surface of the substrate to be used as a SAW delay line device. The results show that the PZT film was successfully deposited on ST-X quartz, and that the PZT film on ST-X quartz can enhance the electromechanical coupling coefficients of SAW.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yu-Jen Hsiao, Te-Hua Fang, Yen-Hwei Chang, Yee-Shin Chang, Sean Wu,