Article ID Journal Published Year Pages File Type
1657772 Surface and Coatings Technology 2013 4 Pages PDF
Abstract
► ITO and AZO films are deposited with various pre-strain applied to the substrate. ► Crystalline for ITO and AZO films decrease at a critical pre-strain level. ► When the pre-strain level is over 4%, cracks appear in the ITO thin film. ► AZO film can tolerate more stress than can ITO film.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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