Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1657772 | Surface and Coatings Technology | 2013 | 4 Pages |
Abstract
⺠ITO and AZO films are deposited with various pre-strain applied to the substrate. ⺠Crystalline for ITO and AZO films decrease at a critical pre-strain level. ⺠When the pre-strain level is over 4%, cracks appear in the ITO thin film. ⺠AZO film can tolerate more stress than can ITO film.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Po Tsung Hsieh, Tse Chang Li, Bo Hsiung Wu, Chung Jen Chung, Jen Fin Lin,