Article ID Journal Published Year Pages File Type
1657859 Surface and Coatings Technology 2013 7 Pages PDF
Abstract
► The use of the gas injection (GI) for controlling the plasma generations process. ► It is possible to produce nanostructure layers with unique properties. ► GI technique efficiency was checked in the case of two PSE methods - IPD and GIMS.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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