Internal DLC coating of narrow metal tubes using high-density near plasma sustained by microwaves propagating along plasma-sheath interfaces

Article ID	Journal	Published Year	Pages	File Type
1657923	Surface and Coatings Technology	2013	6 Pages	PDF

Abstract

âº Microwave-excited high-density plasma was generated inside a narrow metal tube. âº Diamond-like carbon (DLC) was coated inside the tube using the plasma. âº Friction coefficient between the DLC film and cast iron shaft was measured. âº Minimum friction coefficient obtained was 0.17 at the tube end.

Keywords

Internal coating Diamond-like carbon Plasma CVD microwave High-density plasma

Related Topics

Physical Sciences and Engineering Materials Science Nanotechnology

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Internal DLC coating of narrow metal tubes using high-density near plasma sustained by microwaves propagating along plasma-sheath interfaces

Authors

Hiroyuki Kousaka, Kazunori Mori, Noritsugu Umehara, Noboru Tamura, Toyohiko Shindo,