| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1657956 | Surface and Coatings Technology | 2013 | 5 Pages |
Abstract
⺠Increasing substrate temperature promotes the formation of YO bond. ⺠The stoichiometry increases and approaches theoretical stoichiometry at 400 °C. ⺠Structural transformation occurs with grain growth as temperature increases. ⺠Strong YO bond and good crystallinity enhance the refractive index of Y2O3 films. ⺠The relation of grown parameter-structure-optical properties is well established.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Lei Pei, Zhu Jiaqi, Zhu Yuankun, Jiang Chunzhu, Yin Xunbo,