| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1657975 | Surface and Coatings Technology | 2013 | 9 Pages |
Abstract
⺠More than 12-nm-target-period films have comparable multilayer structure. ⺠Under the 6-nm-target-period, nanocomposite structures were observed. ⺠12-Nm-target-period film shows high hardness and nanowear resistance. ⺠Superior boundary lubrication can be obtained for (TiC/DLC)n films. ⺠12-Nm-target-period film shows a low friction and a small damage.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Shojiro Miyake, Takanori Shindo, Manabu Suzuki,