| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1657995 | Surface and Coatings Technology | 2013 | 10 Pages |
Abstract
⺠A selective electrodeposition using laser irradiation (SELI) process is proposed. ⺠The SELI consists of laser irradiation, electrodeposition and ultrasonic cleaning. ⺠The characteristics of recast layer in SELI process were investigated. ⺠The characteristics of electrodeposition were investigated according to conditions. ⺠Selective copper deposition was successfully performed with various micro-patterns.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Chull Hee Cho, Hong Shik Shin, Chong Nam Chu,