| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1658048 | Surface and Coatings Technology | 2013 | 6 Pages |
Abstract
⺠Nanocrystalline rutile TiO2 thin films were obtained by filtered cathodic vacuum arc. ⺠Amorphous-rutile transition was achieved for a substrate temperature (Tsub) > 473 K. ⺠Rutile films have a columnar structure with a crystallite size of ~ 20 nm. ⺠Rrms roughness is ~ 2 nm and it is influenced both by Tsub and applied substrate bias. ⺠Higher hardness (~ 22 GPa) for crystallized and deposited with higher bias films
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Carlo Paternoster, Igor Zhirkov, Marie-Paule Delplancke-Ogletree,