Article ID Journal Published Year Pages File Type
1658164 Surface and Coatings Technology 2013 10 Pages PDF
Abstract
► Microstructures and texture evolution in ZrO2 thin films deposited by MOCVD ► The deposition mechanisms of ZrO2 film deposited by MOCVD ► The growth of tetragonal ZrO2 without doping for microelectronic applications
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Microstructure characterization and deposition mechanism studies of ZrO2 thin films deposited by LI-MOCVD
Authors
, , , , ,