| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1658250 | Surface and Coatings Technology | 2012 | 10 Pages |
Abstract
⺠Arc deposition of Ti-Si-C-N from binary and ternary cathodes is compared. ⺠Carbon supplied either as gaseous CH4 or alloyed in cathode yields similar films. ⺠Cubic-phase films of high hardness formed for as much as 11 at.% Si and 20 at.% C. ⺠Structure and properties systematically studied with respect to Si and C.
Related Topics
Physical Sciences and Engineering
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Authors
A.O. Eriksson, N. Ghafoor, J. Jensen, L.-Ã
. Näslund, M.P. Johansson, J. Sjölen, M. Odén, L. Hultman, J. Rosen,