| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1658254 | Surface and Coatings Technology | 2012 | 9 Pages |
Abstract
⺠We present a rotary reactor for performing thermal and plasma-enhanced ALD. ⺠Different coatings (Al2O3, TiO2 and AlN) were deposited. ⺠Glass beads, metal granules and micron powder and ZnO nanopowders were coated. ⺠Saturation was shown to be linearly dependent on the amount of powder surface. ⺠The coatings were conformal, uniformal and pinhole free.
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Physical Sciences and Engineering
Materials Science
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Authors
Delphine Longrie, Davy Deduytsche, Jo Haemers, Kris Driesen, Christophe Detavernier,