Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1658267 | Surface and Coatings Technology | 2012 | 6 Pages |
Abstract
⺠Study effect of adding MW power on properties of F-DLC films in dual-mode system ⺠Investigate decreasing tendency of F content of the films by adding MW plasma ⺠Study of F-DLC films by EDX, Raman spectroscopy, AFM, contact angle and OES
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
S.I. Hosseini, M. Sharifian, B. Shokri,