Article ID Journal Published Year Pages File Type
1658515 Surface and Coatings Technology 2012 11 Pages PDF
Abstract
► TiN(C) coatings were deposited using unbalance magnetron sputtering. ► The TiN bonds were changed to Ti(CN), CN, CN and CC bonds. ► The hardness of TiN(C) coatings decreased linearly with the C content. ► The TiN(C) coatings deposited at 3 A displayed excellent mechanical properties.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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