Phase transformations in face centered cubic (Al0.32Cr0.68)2O3 thin films

Face centered cubic (Al0.32Cr0.68)2O3 thin films have been annealed in the temperature range of 500–1000 °C during 2–8 h. The fcc structure of the film remains intact when annealed at temperatures up to 700 °C for 8 h. X-ray diffraction and transmission electron microscopy show the onset of phase transformation to corundum phase alloys in the sample annealed at 900 °C for 2 h, where annealing at 1000 °C for 2 h results in complete phase transformation to α-(Al0.32Cr0.68)2O3. In-plane and out-of-plane line scans performed in EDX TEM and θ/2θ XRD patterns did not show any phase separation into α-Cr2O3 and Al2O3 prior and after the annealing. The apparent activation energy of this process is 380–480 kJ/mol as determined by the Johnson–Mehl–Avrami model.

► The fcc structure of the films remained intact up to 700 °C. ► Phase transformation is started in the sample annealed in 900 °C for 2 h. ► Phase transformation from fcc to corundum is completed in 1000 °C. ► No phase separation into the binary α-Cr2O3 and Al2O3 is observed. ► The apparent activation energy is calculated in the range of 380–480 kJ/mol.