| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1658647 | Surface and Coatings Technology | 2011 | 6 Pages |
Abstract
⺠Sputter deposition of amorphous and nanocrystalline Cr3C2 films with high hardness. ⺠Transfomation from amorphous to nanocrystalline phase as a function of bias voltage. ⺠Reason: enhanced densification combined with atomic mobility and structure relaxation. ⺠Universal relationship between deposition and ion impact ratio for densification.
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Authors
C. Ziebert, J. Ye, M. Stüber, S. Ulrich, M. Edinger, I. Barzen,