| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1658709 | Surface and Coatings Technology | 2011 | 5 Pages |
Abstract
⺠Temperature of magnetron target measured during HPPMS sputtering of Ti thin films. ⺠Water-cooled and hot targets investigated by infrared camera. ⺠Solid state phase transformation used to calibrate infrared camera. ⺠Melting of target attained for high discharge currents. ⺠Increase of heat losses at high temperature correlates with higher deposition rates.
Keywords
Related Topics
Physical Sciences and Engineering
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Nanotechnology
Authors
J. TesaÅ, J. Martan, J. Rezek,