Texture modification of wurtzite piezoelectric films by ion beam irradiation

Article ID	Journal	Published Year	Pages	File Type
1658859	Surface and Coatings Technology	2011	4 Pages	PDF

Abstract

âº Unusual (11-20) oriented ZnO and AlN films were obtained by ion beam sputtering. âº Mechanism relates to energetic particle irradiation during deposition. âº Crystal grains in the films have strong out-of plane and in-plane orientation.

Keywords

Physical vapor deposition processes Piezoelectric materials X-ray diffraction

Related Topics

Physical Sciences and Engineering Materials Science Nanotechnology

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Texture modification of wurtzite piezoelectric films by ion beam irradiation

Authors

Takahiko Yanagitani, Masato Kiuchi,