Mechanical properties, deformation behaviors and interface adhesion of (AlCrTaTiZr)Nx multi-component coatings

In this study, (AlCrTaTiZr)Nx multi-component coatings with quinary metallic elements were developed as protective hard coatings for tribological application. The mechanical properties, creep behaviors, deformation mechanisms and interface adhesion of the (AlCrTaTiZr)Nx coatings with different N contents were characterized. With increasing the N2-to-total (N2 + Ar) flow ratio, RN, during sputtering deposition, the (AlCrTaTiZr)Nx coatings transformed from an amorphous metallic phase to a nanocomposite and finally a crystalline nitride structure. The hardness of the coatings accordingly increased from 13 GPa to a high value of about 30 GPa, but the creep strain rate also increased from 1.3 × 10− 4 to 7.3 × 10− 4 1/s. The plastic deformation of the amorphous metallic coating deposited with RN = 0% proceeded through the formation and extension of shear bands, whereas dislocation activities dominated the deformation behavior of the crystalline nitride coatings deposited with RN = 10% and 30%. With increasing RN, the interface adhesion energy between the coatings and the substrates was also enhanced from 6.1 to 22.9 J/m2.