Morphology of the TiN coatings obtained by the IPD method with two frequencies of impulse plasma generation

In this work we present the results of studies that compare the structure of coatings obtained by the Impulse Plasma Deposition (IPD) method with two different frequencies of generation of plasma impulses. As a control material the TiN coating was chosen. The morphology and topography of the layers were characterized by means of scanning and transmission electron microscopies (SEM, TEM). Results of our investigation showed that an increase in the frequency of plasma generation from 0,25 Hz to 4 Hz enhanced the more intensive agglomeration and crystallization processes. Additionally the increase in number of plasma impulses in the case of the HF IPD process was accompanied by an increase of the number of agglomerates without visible changes in dimensions.