Study on the Si penetration into Fe sheets using PVD method and its application in the fabrication of Fe-6.5 wt.% Si alloys

FeSi (12 wt.% Si) and Si were alternatively deposited on pure iron (Fe) substrates by direct current magnetron sputtering. Subsequent annealing in vacuum at 1150–1190 °C results in penetration of Si into the substrate. Cross-sectional microstructure and Si concentration were investigated by scanning electron microscopy (SEM) and energy dispersive spectrometer (EDS). The penetration mechanism is found to depend greatly on Si amount in the as-deposited films. When FeSi/Si/FeSi/Si/FeSi was deposited on the Fe substrate, the Si penetration is controlled by phase-boundary migration, while a diffusion-controlling penetration is observed in FeSi/Si/FeSi deposited samples. Fe-6.5 wt.% Si sheet with thickness of 0.35 mm is obtained through the deposition of FeSi/Si multilayer on a Fe-3 wt.% Si sheet together with subsequent annealing at 1180 °C for 2 h.