Article ID Journal Published Year Pages File Type
1660344 Surface and Coatings Technology 2009 4 Pages PDF
Abstract

Ternary transition metal nitrides have gained special attention in an effort to improve further the properties of the corresponding binary compounds. In this work, we present a comparative study of a very wide range of ternary transition metal nitrides of the form: TixMe1-xN and TaxMe1-xN (Me = Ti,Zr,Hf,Nb,Ta,Mo,W) over the whole x range (0 < x < 1) grown by Pulsed Laser Deposition (PLD) and by Dual Ion Beam Sputtering. We study the stability of the rocksalt structure in all these films experimentally and theoretically through ab-initio calculations. We investigate the validity of Vegard's rule and the effect of growth-dependent stresses to the lattice constant.

Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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